VDL-ETG & TU/e mini-symposium: Active Contamination Control
The High Tech Systems Center together with VDL Enabling Technologies Group have organized a mini-symposium ‘Contamination Control‘ on 1 February 2024.
PROGRAM
12:30 Walk-in with coffee and tea at the Auditorium, TU/e
13:00 Welcome by Ton Peijnenburg | CTO VDL-ETG
13:10 Introduction ACCESS project
Paul Blom | Sr. System Engineer at VDL-ETG
13:25 Particle creation
Towards understanding wear particle generation on silicon wafers | PhD candidate Sven Sperling and EngD candidate Tom Bertens
13:55 Particle transport
Thermophoretic force in a rarefied gas | PhD Candidate Ralf Reinartz
14:25 Coffee break
14:45 Particle removal
Plasma based dust filter | PhD candidate Judith van Huijstee
15:15 Conclusions ACCESS project
Kasper van den Broek | Tribology Expert & Contamination Control Architect
15:30 Coffee break and poster market
16:00 Official start ACCESS-2 project (in Dutch)
with TU/e Rector Magnificus Silvia Lenaerts, and Geert Jakobs CEO of VDL-ETG
16:30 – 17:45 Drinks and poster market
Registration is required but free of charge.
Register
Participation is free of charge, however, registration is mandatory. You can register via the button below.
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